Optical Metrology – Kjell J. G?asvik – 3rd Edition

Prefacio
•Preface to the Third Edition
1. Basics
•1.1 Introduction
•1.2 Wave Motion. The Electromagnetic Spectrum
•1.3 The Plane Wave. Light Rays
•1.4 Phase Difference
•1.5 Complex Notation. Complex Amplitude
•1.6 Oblique Incidence of a Plane Wave
•1.7 The Spherical Wave
•1.8 The Intensity
•1.9 Geometrical Optics
•1.10 The Simple Convex (Positive) Lens
•1.11 A Plane-Wave Set-Up
2. Gaussian Optics
•2.1 Introduction
•2.2 Refraction at a Spherical Surface
o2.2.1 Examples
•2.3 The General Image-Forming System
•2.4 The Image-Formation Process
•2.5 Reflection at a Spherical Surface
•2.6 Aspheric Lenses
•2.7 Stops and Apertures
•2.8 Lens Aberrations. Computer Lens Design
•2.9 Imaging and The Lens Formula
•2.10 Standard Optical Systems
o2.10.1 Afocal Systems. The Telescope
o2.10.2 The Simple Magnifier
o2.10.3 The Microscope
3. Interference
•3.1 Introduction
•3.2 General Description
•3.3 Coherence
•3.4 Interference between Two Plane Waves
o3.4.1 Laser Doppler Velocimetry (LDV)
•3.5 Interference between Other Waves
•3.6 Interferometry
o3.6.1 Wavefront Division
o3.6.2 Amplitude Division
o3.6.3 Dual-Frequency Michelson Interferometer
o3.6.4 Heterodyne (Homodyne) Detection
•3.7 Spatial and Temporal Coherence
•3.8 Optical Coherence Tomography
4. Diffraction
•4.1 Introduction
•4.2 Diffraction from a Single Slit
•4.3 Diffraction from a Grating
o4.3.1 Grating Equation. Amplitude Transmittance
o4.3.2 Spatial Frequency Spectrum
•4.4 Fourier Optics
•4.5 Optical Filtering
o4.5.1 Practical Filtering Set-Ups
•4.6 Physical Optics Description of Image Formation
o4.6.1 Coherent Transfer Function
o4.6.2 Incoherent Transfer Function
o4.6.3 Depth of Focus
•4.7 Phase-Modulated Sinusoidal Grating
5. Light Sources and Detectors
•5.1 Introduction
•5.2 Radiometry. Photometry
o5.2.1 Lambertian Surface
o5.2.2 Blackbody Radiator
o5.2.3 Examples
•5.3 Incoherent Light Sources
•5.4 Coherent Light Sources
o5.4.1 Stimulated Emission
o5.4.2 Gas Lasers
o5.4.3 Liquid Lasers
o5.4.4 Semiconductor Diode Lasers. LEDs
o5.4.5 Solid-State Lasers
o5.4.6 Other Lasers
o5.4.7 Enhancements of Laser Operation
o5.4.8 Applications
o5.4.9 Coherence Length of a Laser
•5.5 Hologram Recording Media
o5.5.1 Silver Halide Emulsions
o5.5.2 Thermoplastic Film
o5.5.3 Photopolymer Materials
•5.6 Photoelectric Detectors
o5.6.1 Photoconductors
o5.6.2 Photodiodes
•5.7 The CCD Camera
o5.7.1 Operating Principles
o5.7.2 Responsivity
•5.8 Sampling
o5.8.1 Ideal Sampling
o5.8.2 Non-Ideal Sampling
o5.8.3 Aliasing
•5.9 Signal Transfer
6. Holography
•6.1 Introduction
•6.2 The Holographic Process
•6.3 Alternative Description
•6.4 Uncollimated Reference and Reconstruction Waves
•6.5 Diffraction Efficiency. Phase Hologram
•6.6 Volume Holograms
•6.7 Stability Requirements
•6.8 Holographic Interferometry
o6.8.1 Double-Exposure Interferometry
o6.8.2 Real-Time Interferometry
o6.8.3 Analysis of Interferograms
o6.8.4 Localization of Interference Fringes
•6.9 Holographic Vibration Analysis
•6.10 Holographic Interferometry of Transparent Objects
7. Moiré Methods and Triangulation
•7.1 Introduction
•7.2 Sinusoidal Gratings
•7.3 Moiré between Angularly Displaced Gratings
•7.4 In-Plane Deformation and Strains
o7.4.1 Increasing Sensitivity Methods
•7.5 Out-of-Plane Deformations. Contouring
o7.5.1 Shadow Moiré
o7.5.2 Projected Fringes
o7.5.3 Vibration Analysis
o7.5.4 Moiré with Digital Image Processing
•7.6 Reflection Moiré
•7.7 Triangulation
8. Speckle Methods
•8.1 Introduction
•8.2 The Speckle Effect
•8.3 Speckle Size
•8.4 Speckle Photography
o8.4.1 Fourier Fringe Method
o8.4.2 Young Fringe Method
•8.5 Speckle Correlation
•8.6 Speckle-Shearing Interferometry
•8.7 White-Light Speckle Photography
9. Photoelasticity and Polarized Light
•9.1 Introduction
•9.2 Polarized Light
•9.3 Polarizing Filters
o9.3.1 Linear Polarizer
o9.3.2 Retarders
•9.4 Unpolarized Light
•9.5 Reflection and Refraction at Interface
•9.6 Jones Matrix Formalism
•9.7 Photoelasticity
o9.7.1 Introduction
o9.7.2 Plane Polariscope
o9.7.3 Circular Polariscope
o9.7.4 Isochromatics and Compensation
•9.8 Holographic Photoelasticity
•9.9 Three-Dimensional Photoelasticity
o9.9.1 Introduction
o9.9.2 Frozen Stress Method
o9.9.3 Scattered Light Method
•9.10 Ellipsometry
10. Digital Image Processing
•10.1 Introduction
•10.2 Frame Grabber
•10.3 Digital Image Representation
•10.4 Camera Calibration
o10.4.1 Lens Distortion
o10.4.2 Perspective Transformations
•10.5 Image Processing
o10.5.1 Contrast Stretching
o10.5.2 Convolution
o10.5.3 Noise Suppression
o10.5.4 Edge Detection
•10.6 DFT and FFT
11. Fringe Analysis
•11.1 Introduction
•11.2 Intensity-Based Methods
o11.2.1 Introduction
o11.2.2 Prior Knowledge
o11.2.3 Fringe Tracking and Thinning
o11.2.4 Sub-Pixel Accuracy
•11.3 Phase-Measurement Interferometry
o11.3.1 Introduction
o11.3.2 TPMI Principles
o11.3.3 Phase Modulation
o11.3.4 Techniques
o11.3.5 TPMI Errors
•11.4 Spatial Phase-Measurement Methods
o11.4.1 Multichannel Interferometer
o11.4.2 Multichannel Errors
o11.4.3 Spatial-Carrier Method
o11.4.4 Fourier Transform Errors
o11.4.5 Space Domain
•11.5 Phase Unwrapping
o11.5.1 Introduction
o11.5.2 Techniques
o11.5.3 Path-Dependent Methods
o11.5.4 Path-Independent Methods
o11.5.5 Temporal Unwrapping
12. Computerized Optical Processes
•12.1 Introduction
•12.2 TV Holography (ESPI)
•12.3 Digital Holography
•12.4 Digital Speckle Photography
13. Fibre Optics in Metrology
•13.1 Introduction
•13.2 Light Propagation in Optical Fibres
•13.3 Attenuation and Dispersion
•13.4 Types of Fibres
•13.5 Fibre-Optic Sensors
•13.6 Fibre-Bragg Sensors
Apéndices
•A. Complex Numbers
•B. Fourier Optics
oB.1 Fourier Transform
oB.2 Functions and Transforms
oB.3 Implications
•C. Fourier Series
•D. Least-Squares Error Method
•E. Semiconductor Devices
Referencias
•References and Further Reading
Índice
•Index